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A small deployable infrared diffractive membrane imaging system 会议论文
Holography, Diffractive Optics, and Applications VII, Beijing, China, October 12, 2016 - October 14, 2016
作者:  Zhang, Yue;  Jin, Jiangao;  Wang, Baohua;  Wu, Peng;  Jiao, Jianchao;  Su, Yun
Adobe PDF(1000Kb)  |  收藏  |  浏览/下载:84/0  |  提交时间:2018/03/16
Single-mode-resonance interference in photoresist sub-micron waveguide for high exposure depth nanolithography 期刊论文
MICROELECTRONIC ENGINEERING, 2016, 卷号: 154, 页码: 8-11
作者:  Yang, Zheng;  Zhang, Zhiyou;  Wu, Peng;  Xia, Liangping;  Yin, Shaoyun;  Du, Jinglei
收藏  |  浏览/下载:120/0  |  提交时间:2018/03/15
Lithography  Subwavelength  Nanostructure fabrication  Waveguide  Single-mode-resonance