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Multi-scale structure patterning by digital-mask projective lithography with an alterable projective scaling system 期刊论文
AIP Advances, 2018, 卷号: 8, 期号: 6
Authors:  Liu, Yu-Huan;  Zhao, Yuan-Yuan;  Dong, X.-Z.;  Zheng, Mei-Ling;  Jin, Feng;  Liu, Jie;  Duan, Xuan-Ming;  Zhao, Zhen-Sheng
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