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Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor
Wang, Lanlan1; Jiang, Weitao1; Liu, Hongzhong1; Yang, Zhongbo3; Shi, Yongsheng1; Yin, Lei1; Li, Xin2; Ding, Yucheng1; An, Ningli4
2014-12-01
摘要This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f(1) = 26 +/- 1 mu m (the top lens) and f(2) = 35 +/- 1 mu m (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7% from an initial 25.8% (the corresponding aperture diameter is enlarged to 15 mu m from an initial 10 mu m) and the micro lens height ranges from 2.66 mu m to 9.03 mu m. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.
关键词42.79.Bh lenses prisms and mirrors 42.82.Cr fabrication techniques lithography pattern transfer 42.25.Fx diffraction and scattering
DOI10.1088/0960-1317/24/12/125012
发表期刊JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN0960-1317
卷号24期号:12页码:9
通讯作者Wang, LL (reprint author), Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 75049, Peoples R China.
收录类别SCI
WOS记录号WOS:000345824400012
语种英语