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W-band Aperture-Type Scanning Near-Field Microscopy Using Tapered Plastic Probe
Wang, Nan1; Chang, Tianying1,2; Cui, Hong-Liang1,3
2019-07-01
摘要An aluminum-coated PMMA tapered probe with 50 mu m aperture was employed in near-field imaging at 110GHz. The probe was chosen for near-field imaging experiments according to finite-difference time-domain electromagnetic simulation, analysis of antenna resonance, and impedance matching consideration. Imaging of a printed circuit board with a repeated structure of 450-mu m-wide metal strips spaced by 550-mu m-wide dielectric demonstrated a spatial resolution of 15 mu m (lambda/200), which is not just 100 times below the diffraction limit, but is 3 times smaller than the aperture size. Subsurface buried defect in a plastic plate (polytetrafluoroethylene defect in polyester fiber glass, 0.5mm below the top surface of the plate) was also imaged, with a spatial resolution of 1.5mm, and positioning error of the defect less than 0.5mm.
关键词W-band Near-field imaging Aperture-type scanning probe Plastic probe
DOI10.1007/s10762-019-00603-2
发表期刊JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES
ISSN1866-6892
卷号40期号:7页码:801-810
通讯作者Chang, Tianying(tchang@jlu.edu.cn)
收录类别SCI
WOS记录号WOS:000475584400009
语种英语