KMS Chongqing Institute of Green and Intelligent Technology, CAS
| Fabrication of large area diffractive optical elements by laser direct writing | |
Wang, Yunjiao ; Zhang, Weiguo; Yang, Zheng; Xiong, Xin; Xia, Liangping; Gao, Mingyou; Zhang, Dong; Wang, Deqiang; Yuan, Jiahu
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| 2016 | |
| 摘要 | We present a method to fabricate diffractive optical elements (DOEs) with four phase levels by the Laser Direct Writing technology. One computation method is provided to optimize the step depth, which could improve efficiency of DOEs. The step depth and imaging results demonstrate the fabricated DOEs devices with good optical properties. The effective areas of the DOEs pattern are as large as 49 cm2, which could be replicated easily for mass production applications. © 2016 IEEE. |
| 语种 | 英语 |
| DOI | 10.1109/3M-NANO.2016.7824973 |
| 会议(录)名称 | 6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, IEEE 3M-NANO 2016
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| 页码 | 51-54 |
| 通讯作者 | Wang, Deqiang (dqwang@cigit.ac.cn) |
| 收录类别 | EI |
| 会议地点 | Chongqing, China |
| 会议日期 | July 18, 2016 - July 22, 2016 |
