KMS Chongqing Institute of Green and Intelligent Technology, CAS
| Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy | |
Wang, Haitao1; Xie, Wanyi1 ; Wang, Yunjiao1; Zhu, Jifeng1; Liu, Mengwan1; Lu, Wenqiang1; Deng, Yunsheng1,2; Wang, Guodong1,2; Wang, Deqiang1,2
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| 2018 | |
| 摘要 | Both helium and gallium ion beams were employed to fabricate nanopores. Herein, three-dimensional nano-volcano-shaped nanopores (3D-NVNs) were directly formed using helium ion beam with no precursors required, while the gallium ion beam produced V-shaped nanopores. Hundreds of 3D-NVNs were fabricated with a mean diameter of 229 ± 7 nm, where the He ion beam milling rate for the 3D-NVNs was 3.6 ± 0.2 μm3/μC. The height of the 3D-NVNs was greater than their depth when the dose range was 0-10 nC/μm2, while the height remained constant for doses above 10 nC/μm2. Trajectory simulations of the ion bombardment into the gold film clarified that ion implantation could primarily account for the volcano-shaped nanopore formation. © 2017 Author(s). |
| DOI | 10.1116/1.5001927 |
| 发表期刊 | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
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| ISSN | 21662746 |
| 卷号 | 36期号:1 |
| 收录类别 | EI |
| WOS记录号 | WOS:000428278600021 |
| 语种 | 英语 |
| EISSN | 21662754 |
