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	Aberration Analysis of Membrane Diffractive Lens with Substrate Deformation Error
	Li, Taojie1,2,3; Wu, Peng2,3; Yang, Zheng2,3; Yin, Shaoyun2,3; Du, Chunlei2,3; Wang, Yuefeng1
	2017
摘要	A wavefront aberration model with respect to substrate deformation error of membrane diffractive lens is built by means of diffractive ray tracing and wavefront reconstruction method. Two typical cases of the substrate deformation errors, the edge wrinkle surface and the spherical surface with center outward structure, are demonstrated. Meanwhile, the influence of the deformation errors on related image quality is evaluated and the principal aberration type caused by the deformation errors is discussed. The relationship between wavefront root-mean-square aberration, surface peak-to-valley value and Strehl ratio (SR) is investigated. This work would be helpful in assembling membrane diffractive lens and compensating aberration in a real diffractive telescope system. © 2017, Chinese Lasers Press. All right reserved.
DOI	10.3788/AOS201737.1011003
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	02532239
卷号	37期号:10
通讯作者	Wang, Yuefeng (wyf_gx110@sina.com)
收录类别	EI
语种	中文