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Boron-doped diamond nanowires for CO gas sensing application
Peng, Xiaoyan1; Chu, Jin2; Wang, Lidan1; Duan, Shukai1; Feng, Peter3
2017-03-31
摘要Three groups of boron-doped ultrananocrystalline diamond (B-UNCD) nanowires (NWs) arrayed on a silicon substrate were prepared by the successive processes: microwave plasma chemical vapor deposition, electron-beam lithography and reactive ion etching. Au electrodes built on both ends of each group of B-UNCD NWs were combined with a basic electrical circuit to form high-performance gas sensor arrays for carbon monoxide (CO) sensing measurements. the B-UNCD with boundary grain size around few nanometers of has been successfully synthesized, and three groups of reasonable straight diamond NWs with the same diameter and different lengths were built on one single substrate. The heavily boron doping of boron ions in the UNCD induced the ohmic contact between diamond and Au electrodes. (C) 2016 Elsevier B.V. All rights reserved.
DOI10.1016/j.snb.2016.10.009
发表期刊SENSORS AND ACTUATORS B-CHEMICAL
ISSN0925-4005
卷号241页码:383-389
通讯作者Chu, J (reprint author), Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China.
收录类别SCI
WOS记录号WOS:000393253700049
语种英语