KMS Chongqing Institute of Green and Intelligent Technology, CAS
Boron-doped diamond nanowires for CO gas sensing application | |
Peng, Xiaoyan1; Chu, Jin2; Wang, Lidan1; Duan, Shukai1; Feng, Peter3 | |
2017-03-31 | |
摘要 | Three groups of boron-doped ultrananocrystalline diamond (B-UNCD) nanowires (NWs) arrayed on a silicon substrate were prepared by the successive processes: microwave plasma chemical vapor deposition, electron-beam lithography and reactive ion etching. Au electrodes built on both ends of each group of B-UNCD NWs were combined with a basic electrical circuit to form high-performance gas sensor arrays for carbon monoxide (CO) sensing measurements. the B-UNCD with boundary grain size around few nanometers of has been successfully synthesized, and three groups of reasonable straight diamond NWs with the same diameter and different lengths were built on one single substrate. The heavily boron doping of boron ions in the UNCD induced the ohmic contact between diamond and Au electrodes. (C) 2016 Elsevier B.V. All rights reserved. |
DOI | 10.1016/j.snb.2016.10.009 |
发表期刊 | SENSORS AND ACTUATORS B-CHEMICAL |
ISSN | 0925-4005 |
卷号 | 241页码:383-389 |
通讯作者 | Chu, J (reprint author), Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China. |
收录类别 | SCI |
WOS记录号 | WOS:000393253700049 |
语种 | 英语 |