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	Direct Growth of Graphene Films on 3D Grating Structural Quartz Substrates for High-Performance Pressure-Sensitive Sensors
	Song, Xuefen1,2,3; Sun, Tai3; Yang, Jun3; Yu, Leyong3; Wei, Dacheng4,5; Fang, Liang1,2; Lu, Bin3; Du, Chunlei3; Wei, Dapeng3
	2016-07-06
摘要	Conformal graphene films have directly been synthesized on the surface of grating microstructured quartz substrates by a simple chemical vapor deposition process. The wonderful conformality and relatively high quality of the as prepared graphene on the three-dimensional substrate have been verified by scanning electron microscopy and Raman spectra. This conformal graphene film possesses excellent electrical and optical properties with a sheet resistance of <2000 Omega.sq(-1) and a transmittance of >80% (at 550 nm), which can be attached with a flat graphene film on a poly(dimethylsiloxane) substrate, and then could work as a pressure-sensitive sensor. This device possesses a high-pressure sensitivity of -6.524 kPa(-1) in a low-pressure range of 0-200 Pa. Meanwhile, this pressure-sensitive sensor exhibits super-reliability (>= 5000 cycles) and an ultrafast response time (<= 4 ms). Owing to these features, this pressure-sensitive sensor based on 3D conformal graphene is adequately introduced to test wind pressure, expressing higher accuracy and a lower background noise level than a market anemometer.
关键词	conformal graphene grating structured quartz substrates direct CVD growth pressure-sensitive sensor wind pressure
DOI	10.1021/acsami.6b04526
发表期刊	ACS APPLIED MATERIALS & INTERFACES
ISSN	1944-8244
卷号	8期号:26页码:16869-16875
通讯作者	Wei, DP (reprint author), Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China.
收录类别	SCI
WOS记录号	WOS:000379456000041
语种	英语