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A nano-radian precision absolute local slope measurement method for X-ray reflectors
Wu, Hao1,2; Ran, Zhuo-rui2; Chen, Xing; Li, Jia-lu1; Yang, Zheng2; Zhang, Zhi-you3; Wu, Peng1,2; Du, Chun-lei1,4
2023-07-03
摘要Ultra-precise reflectors in the advanced light source facilities urgently call for local slope error measurements with nano-radian precision. However, the existing methods currently utilized in the long trace profiler systems struggle to meet the requirements. In this paper, we present a weak-value amplification enhanced absolute local slope measurement scheme, in which the surface height difference between two adjacent points can be measured directly with precision on the pico-meter level. As a result, the absolute local slope measurement reaches a record precision level of 9.7 nrad (RMS) with a small lateral separation of 0.5 mm. Comparing to the existing methods, our scheme is more disturbance-resistant, more compact and cost-effective. The local curvature measuring capability is also validated with two synchronously parallel local slope measurement paths, between which the separation is set as 2mm. A local curvature measurement is obtained with precision of 3.4 x 10-6m-1 (RMS) and its corresponding slope variation is 6.8 nrad. Our method exhibits important application prospects in the field of ultra-precise surface fabrication inspection. & COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
DOI10.1364/OE.474177
发表期刊OPTICS EXPRESS
ISSN1094-4087
卷号31期号:14页码:23642-23650
通讯作者Wu, Peng(wupeng@cigit.ac.cn)
收录类别SCI
WOS记录号WOS:001034100300008
语种英语