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Facile sensitizing of PbSe film for near-infrared photodetector by microwave plasma processing
Zhao, Kangyi1; Feng, Shuanglong2; Yang, Chan2; Shen, Jun2; Fu, Yongqi1
2022-03-01
摘要High quality PbSe film was first fabricated by a thermal evaporation method, and then the effect of plasma sensitization on the PbSe film was systemically investigated. Typical detectivity and significant photosensitivity are achieved in the PbSe-based photodetector, reaching maximum values of 7.6 x 10(9) cm.Hz(1/2)/W and 1.723 A/W, respectively. Compared with thermal annealing, plasma sensitization makes the sensitization easier and significantly improves the performance.
关键词PbSe film infrared photodetector plasma processing
DOI10.1088/1674-1056/ac3224
发表期刊CHINESE PHYSICS B
ISSN1674-1056
卷号31期号:3页码:6
通讯作者Feng, Shuanglong(fengshuanglong@cigit.ac.cn) ; Fu, Yongqi(yqfu@uestc.edu.cn)
收录类别SCI
WOS记录号WOS:000767566300001
语种英语