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Additive and subtractive manufacturing of gold micro/nanostructures by using laser trapping and ablation
Cao, Hong-Zhon1; Cao, Liang-Chen2; Fang, Gan2; Zhaoc, Yuan-Yuan3; Xud, Guo-Juan4; Chen, Zhong-Yun5; Duanc, Xuan-Ming3
2022-05-01
摘要Gold micro/nanostructures were additively manufactured by using laser trapping of gold nanoparticles in an aqueous solution. Gold wire composed of sintered compacted nanoparticles with spatial resolution of 470 nm was fabricated. Influence factors for wire fabrications were also studied systematically. In order to investigate the fabrication capacity of this technology for three-dimensional structures, several microstructures were fabricated. A new additive and subtractive hybrid manufacturing technology by using laser trapping and ablation was proposed and realized to further improve the spatial resolution of the fabricated structures. A gold microring with line width of 37 nm was fabricated through precisely controlling fabrication parameters. This hybrid manufacturing technology has great application prospects in the fabrication of high spatial resolution nanostructures.
关键词Hybrid manufacturing technology Gold micro nanostructures Laser trapping Laser ablation
DOI10.1016/j.optlaseng.2022.106959
发表期刊OPTICS AND LASERS IN ENGINEERING
ISSN0143-8166
卷号152页码:5
通讯作者Cao, Hong-Zhon(hzcao@qfnu.edu.cn) ; Duanc, Xuan-Ming(xmduan@jnu.edu.cn)
收录类别SCI
WOS记录号WOS:000767885600011
语种英语