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The Smallest Resonator Arrays in Atmosphere by Chip-Size-Grown Nanowires with Tunable Q-factor and Frequency for Subnanometer Thickness Detection
Jiang, Chengming1; Tang, Chaolong1; Song, Jinhui1,2
2015-02-01
摘要A chip-size vertically aligned nanowire (NW) resonator arrays (VNRs) device has been fabricated with simple one-step lithography process by using grown self-assembled zinc oxide (ZnO) NW arrays. VNR has cantilever diameter of 50 nm, which breakthroughs smallest resonator record (>100 nm) functioning in atmosphere. A new atomic displacement sensing method by using atomic force microscopy is developed to effectively identify the resonance of NW resonator with diameter 50 nm in atmosphere. Size-effect and half-dimensional properties of the NW resonator have been systematically studied. Additionally, VNR has been demonstrated with the ability of detecting nanofilm thickness with subnanometer (<109m) resolution.
关键词Nanowire resonator nanoresonator arrays NEMS size effect half dimension thickness detection
DOI10.1021/nl504135x
发表期刊NANO LETTERS
ISSN1530-6984
卷号15期号:2页码:1128-1134
通讯作者Song, JH (reprint author), Univ Alabama, Dept Met & Mat Engn, Ctr Mat Informat Technol MINT, Tuscaloosa, AL 35487 USA.
收录类别SCI
WOS记录号WOS:000349578000051
语种英语