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	Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy
	Whelan,Patrick R1,2; Zhou,Binbin3; Bezencenet,Odile4; Shivayogimath,Abhay1,2; Mishra,Neeraj5,6; Shen,Qian3,7,8; Jessen,Bjarke S1,2,9,10; Pasternak,Iwona11,12; Mackenzie,David M A13; Ji,Jie1,2
	2021-02-17
摘要	Abstract Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
关键词	terahertz spectroscopy large-scale graphene CVD graphene electrical mapping
DOI	10.1088/2053-1583/abdbcb
发表期刊	2D Materials
卷号	8期号:2
通讯作者	B?ggild,Peter()
WOS记录号	IOP:tdm_8_2_022003
语种	英语