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A novel dielectric breakdown apparatus for solid-state nanopore fabrication with transient high electric field
Fang, Shaoxi1,2; Yin, Bohua1,3; Xie, Wanyi1,2; Zhou, Daming1,2; Tang, Peng1,2; He, Shixuan1,2; Yuan, Jiahu1,2; Wang, Deqiang1,2
2020-09-01
摘要The dielectric breakdown used to fabricate solid-state nanopores has separated the device from capital-intensive industries and has been widely adopted by various research teams, but there are still problems with low production efficiency and uncertain location. In this work, based on the transient breakdown phenomenon of nanofilms, a new type of dielectric breakdown apparatus for nanopore fabrication is reported. It integrates both nano-manipulation technology and dielectric breakdown nanopore fabrication technology. The nanometer distance detection method and circuit are introduced in detail. The generation principle and procedures of the transient high electric field are explained step by step. The characterization of the nanopores shows that this apparatus can fabricate sub-2 nm nanopores at a pre-located position. Besides, the nanopore diameter can be easily adjusted by setting the transient high electric field value.
DOI10.1063/5.0024079
发表期刊REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN0034-6748
卷号91期号:9页码:6
通讯作者He, Shixuan(heshixuan@cigit.ac.cn) ; Yuan, Jiahu(yjh@cigit.ac.cn) ; Wang, Deqiang(dqwang@cigit.ac.cn)
收录类别SCI
WOS记录号WOS:000575126400001
语种英语