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Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial
Zhang, Weiguo1,2; Zhu, Guodong2; Zhu, Xiaoqiang2; Du, Chunlei1,2
2020-08-28
摘要Spiral-structure metamaterial (SSM) is of great importance, however, there are fewer methods to fabricate SSM due to limitations of material particularity and working accuracy. In this paper, a systematic scheme for fabricating SSM is proposed by employing the metal mold making with diamond-based ultra-precision turning technique and then molding replication method. By studying the path planning algorithm of the turning, molding error law, and a technique of how to compensate for the error, a solution for SSM is consequently formed. Our experimental results show a satisfying SSM with a surface roughness under 5 nm and a surface shape error under 0.63% of the designed wavelength (30 um). Moreover, this SMM element is processed within 10 min, with low cost materials and processes. Based on these advantages, our SSM processing scheme shows a remarkable potential in precise fabricating phase plates and industrialized application of terahertz metamaterial in the future.
关键词micron nano-fabrication spiral-structure matamaterial optics terahertz optics elements microoptics ultra-precision fabrication
DOI10.3389/fphy.2020.00267
发表期刊FRONTIERS IN PHYSICS
ISSN2296-424X
卷号8页码:7
通讯作者Du, Chunlei(cldu@cigit.ac.cn)
收录类别SCI
WOS记录号WOS:000570416300001
语种英语